Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation

This letter demonstrates the linear dynamic range enhancement of a mode-localized microelectromechanical systems sensor based on two weakly coupled cantilevers under electrostatic actuation resulting in repulsive force. An analytical model is proposed to design sensor, and expression force obtained using finite element simulation. Compared attractive actuation, intensity less sensitive change cantilever's displacement, with negligible nonlinearities. result confirmed by experimental measurements showing vibrations up 70% gap, which almost three times higher than critical amplitude similar device Finally, mass sensing capability highlighted depositing few picograms platinum sensor.